摘要 |
PROBLEM TO BE SOLVED: To enhance the impact resistance of a piezoelectric/electrostrictive device. SOLUTION: The piezoelectric/electrostrictive device 10A comprises a pair of opposed thin plates 12a and 12b, a fixed part 14 for supporting the thin plates 12a and 12b, and a ceramic base 16 having movable parts 20a and 20b at the distal ends of the pair of the thin plates 12a and 12b. In the movable parts 20a and 20b of the device 10A, the part opposed to the fixed part 14 is formed stepwisely, and a step 210 is provided at mounting surfaces 34a and 34b. Notches (cutouts) 212 are formed near the plates 12a and 12b of the inner wall of the fixed part 14, and further steps 214 are provided at inner walls close to the plates 12a and 12b of the inner wall of the notch 212. COPYRIGHT: (C)2003,JPO
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