| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon probe card in which the position of respective inspection terminals arranged and installed at microscopic pitches and composed of a needlelike crystal is calculated surely in a photographing operation with a camera, and in which the alignment of an electrode pad with the respective inspection terminals can be performed automatically, and to provide a method of manufacturing the silicon probe card. SOLUTION: The surface of an Si substrate 1 is covered with an insulating face 2, a conductive-film formation face 3 in the same pattern as a wiring pattern and an alignment mark 2 are formed on the insulation face, the needlelike crystal 4 is formed in a prescribed place on the face 3, the face 3, the needlelike crystal 4 and the alignment mark 20 are plated selectively with reference to the insulating face 2, and a conductive film is formed on the face 3 and the needlelike crystal 4, and a metal coating 21 whose reflectance is different from that of the insulating face is applied to the alignment mark 20. COPYRIGHT: (C)2003,JPO
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