| 摘要 |
PROBLEM TO BE SOLVED: To high-speedily and high-accurately measure various kinds of geometrical characteristics related to the surface areas of different articles while suppressing the complication of the structure and the increase in the manufacturing cost of an article measuring device. SOLUTION: The article measuring device 10 is provided with a detecting part 14 detecting geometrical characteristics of an article W supported by a support part 12 with a non-contact method. The detecting part 14 is provided with a plurality of detecting heads 42, 44, 46, 48 for individually detecting the geometrical characteristics related to the mutually different surface areas of the article W, a head moving mechanism 50 approaching the selected detecting head to the article W and detect it with moving their detecting heads 42, 44, 46, 48 to the article W and selecting one of the detecting heads, and a laser sensor 52 arranged in relation to the selected detecting head. The selected detecting head is two-dimensionally moved along the surface area desired by the article W, together with the laser sensor 52. COPYRIGHT: (C)2003,JPO
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