摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an article coated with a film of diamond or diamond-like carbon, which can simplify a manufacturing process by directly forming a film on a substrate, and gives a high bonding strength between the film and the substrate. SOLUTION: This manufacturing method comprises heat-treating a substrate consisting of a hard metal or a cermet, in an atmosphere of mixed gas containing hydrogen and carbon, at a temperature at which components of bonding phases in the substrate can move therein, and then forming a diamond film or a diamond-like carbon film directly on the heat-treated surface, with a vapor phase synthesis method. The heat treatment is conducted in a vacuum furnace which makes such a source exist therein as to generate a carbon- containing gas when heated, concretely by using carbon, a carbon-containing heater, or a crucible paved with either of carbon black, graphite or carbide, as the source. COPYRIGHT: (C)2003,JPO
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