Semiconductor lasers, and optical modules and systems using these lasers

摘要

In a surface-emitting laser comprising an active region for emitting light and upper and lower DBR's sandwiching this active region from below and above to form resonators, a plurality of selective oxidation layers having an aperture which is an unoxidized region are formed in the upper DBR, lower DBR or both of them and the aperture is made wider stepwise as it becomes farther from the active region, thereby greatly reducing the capacitance of the laser. A high-speed optical module comprising the above surface-emitting laser as a light source has high performance, long service life and is inexpensive.