FIXING EQUIPMENT OF CHEMICAL-FILTER USING SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT

摘要

PURPOSE: Fixing equipment of chemical-filter using semiconductor device manufacturing equipment is provided to efficiently replace a chemical filter with a new one by improving the structure of the fixing apparatus. CONSTITUTION: Fixing equipment of chemical-filter is provided with a frame(22), a loading plate(24) having a loading hole(26) fixedly installed on the lower portion of the frame(22) for inserting a chemical filter to the predetermined depth, a fixing plate(28) having a fixing groove(30) fixedly installed on the upper portion of the frame(22) corresponding to the loading plate(24) for fixing one side of the chemical filter, and a support plate(34) having a support groove(36) connected to the fixing plate(28) for supporting the other side of the chemical filter.