发明名称 INSPECTION METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To easily detect leakage failure in a digital circuit after packaging chips in a semiconductor device where an analog circuit and a digital circuit are integrated into one chip and at the same time a power supply terminal is shared while chips have been packaged. SOLUTION: In inspection, a transistor 17 that is arranged in a power supply line from a power supply terminal 13 to a digital circuit 11 is turned off for breaking, at the same time a supply voltage is applied to the power supply terminal 13 while the digital circuit 11 is being set to a test mode, and current leakage in the digital circuit 11 is detected by potential difference that is generated in a detection resistor 28 that is connected in parallel with a break section at the power supply line from the power supply terminal 13 to the digital circuit 11.
申请公布号 JP2003156545(A) 申请公布日期 2003.05.30
申请号 JP20010357080 申请日期 2001.11.22
申请人 DENSO CORP 发明人 GOTO KUNIHIKO
分类号 G01R31/319;G01R19/165;G01R31/28;G01R31/316;H01L21/822;H01L27/04;(IPC1-7):G01R31/319 主分类号 G01R31/319
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