| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum device of high operation efficiency capable of raising a temperature of a cooling trap provided inside a vacuum chamber in a short time and shortening the time required for re-running. SOLUTION: This MBE device is provided with a liquid nitrogen cryopanel 2, a baking panel 10, and a temperature medium circulation device 7, The temperature medium circulation device 7 introduces gaseous nitrogen at a high temperature into the liquid nitrogen cryopanel 2 provided inside the vacuum chamber 1, and raises the temperature on a surface of the liquid nitrogen cryopanel 2 in a short time. Thus, since moisture, white phosphorus, phosphoric acid harmful to semiconductor manufacture adsorbed on the surface of the liquid nitrogen cryopanel 2 are evaporated in a short time, the operation efficiency of the MBE device is improved.
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