SEMICONDUCTOR DEVICE EQUIPPED WITH FIELD PLATE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device which is equipped with a field plate protected against deterioration caused by an applied voltage and high in reliability. SOLUTION: This semiconductor device is equipped with a field limiting ring and a field plate in a termination region formed adjacent to an active region through which a current flows. The field plate functions as a resistor, has resistivity of 5×10<-3>Ωcm or larger, and is made of polycrystalline silicon. An insulating layer is formed between the field plate and field limiting ring to insulate them from each other.