| 摘要 |
The present invention provides a method of examining quality of cerium-based abrasives which can simply determine their grinding characteristics. Specifically, the method employs X-ray diffractometry to examine qualities based on, for example, B/A wherein A and B are peak intensities relevant to LnxOy and LnF3, respectively. The present invention further provides: a method of producing a cerium-based abrasive which can give cerium-based abrasive with specific grinding characteristics; and a cerium-based abrasive which has specific grinding characteristics for specific purposes. |
