摘要 |
A process for manufacturing an integrated circuit provides for the formation of a matrix of floating-gate non-volatile memory cells having dual polysilicon levels, with the two polysilicon levels being isolated by a gate dielectric layer (4) and an interpoly dielectric layer (9) therebetween, and for the concurrent formation of one type of thick-oxide transistor (21) having an active area (7) in regions peripheral to the matrix. The process of the invention provides for removal, during the step of defining the first-level polysilicon (5), the polysilicon (5) from the active area (7) of the thick-oxide transistor (21), so that the gate oxide of the transistor (21) results from the superposition of the first (4) and second (9) dielectric layers.
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