发明名称 Protective layer in memory device and method therefor
摘要 A method for protecting a non-volatile memory device, the method including forming a non-volatile memory device including a polycide structure formed over a non-conducting charge trapping layer, and forming a protective layer over at least a portion of the polycide structure, the protective layer being adapted to absorb electromagnetic wave energy having a wavelength shorter than visible light. A device constructed in accordance with the method is also disclosed.
申请公布号 US2003096475(A1) 申请公布日期 2003.05.22
申请号 US20010988122 申请日期 2001.11.19
申请人 BLOOM ILAN;EITAN BOAZ 发明人 BLOOM ILAN;EITAN BOAZ
分类号 H01L21/8247;H01L21/28;H01L21/336;H01L21/8246;H01L27/115;H01L29/51;H01L29/788;H01L29/792;(IPC1-7):H01L21/336;H01L21/320;H01L21/476 主分类号 H01L21/8247
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