| 摘要 |
<p>MEMS device (100) having an electrothermal actuator (126) and release and a method for fabrication. According to one embodiment, a microscale switch (100) is provided and can include a substrate (102) and a stationary electrode (106) and stationary contact (104) formed on the substrate (102). The switch (100) can further include a movable microcomponent (108) suspended above the substrate (102). The microcomponent (108) can include a structural layer (112) including at least one end fixed with respect to the substrate (102). The microcomponent (108) can further include a movable electrode (118) spaced from the stationary electrode (106). The microcomponent (108) can include an electrothermal component (126) attached to the structural layer (112) and operable to produce heating for generating force for moving the structural layer (112).</p> |
