发明名称 Plasma focus light source with tandem ellipsoidal mirror units
摘要 A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 pi steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.
申请公布号 US6566668(B2) 申请公布日期 2003.05.20
申请号 US20010875721 申请日期 2001.06.06
申请人 CYMER, INC. 发明人 RAUCH JOHN E.;PARTLO WILLIAM N.;FOMENKOV IGOR V.;NESS RICHARD M.;BIRX DANIEL L.;SANDSTROM RICHARD L.;MELNYCHUK STEPHAN T.
分类号 G03F7/20;H05G2/00;H05H1/06;(IPC1-7):H05H1/04 主分类号 G03F7/20
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