发明名称 METHOD OF PRODUCING CALCIUM FLUORIDE SINGLE CRYSTAL HAVING FRACTURE RESISTANCE AND ITS USE
摘要 PROBLEM TO BE SOLVED: To provide a method of producing a calcium fluoride single crystal having high fracture resistance or breakage resistance. SOLUTION: The method of producing the calcium fluoride single crystal is utilized for producing a large size calcium fluoride single crystal having fracture resistance, and includes (a) a process for doping 1 to 250 ppm strontium in a calcium fluoride raw material, (b) a process for forming a melt of calcium fluoride by melting the calcium fluoride raw material, and (c) a process for preparing a calcium fluoride single crystal by cooling the melt of calcium fluoride formed in the process (b) so as to solidify it.
申请公布号 JP2003137689(A) 申请公布日期 2003.05.14
申请号 JP20020250230 申请日期 2002.08.29
申请人 CARL ZEISS:FA;CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG 发明人 KANDLER JOERG;MOERSEN EWALD;SPEIT BURKHARD;BAUER HARRY;BOEHM THURE;EVA ERIC;THIER MICHAEL;WANG HEXIN;RICHTER FRANK;PAUS HANS-JOSEF
分类号 C30B29/12;C30B11/00;C30B11/02;G02B1/02 主分类号 C30B29/12
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