发明名称 |
METHOD OF PRODUCING CALCIUM FLUORIDE SINGLE CRYSTAL HAVING FRACTURE RESISTANCE AND ITS USE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a calcium fluoride single crystal having high fracture resistance or breakage resistance. SOLUTION: The method of producing the calcium fluoride single crystal is utilized for producing a large size calcium fluoride single crystal having fracture resistance, and includes (a) a process for doping 1 to 250 ppm strontium in a calcium fluoride raw material, (b) a process for forming a melt of calcium fluoride by melting the calcium fluoride raw material, and (c) a process for preparing a calcium fluoride single crystal by cooling the melt of calcium fluoride formed in the process (b) so as to solidify it. |
申请公布号 |
JP2003137689(A) |
申请公布日期 |
2003.05.14 |
申请号 |
JP20020250230 |
申请日期 |
2002.08.29 |
申请人 |
CARL ZEISS:FA;CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG |
发明人 |
KANDLER JOERG;MOERSEN EWALD;SPEIT BURKHARD;BAUER HARRY;BOEHM THURE;EVA ERIC;THIER MICHAEL;WANG HEXIN;RICHTER FRANK;PAUS HANS-JOSEF |
分类号 |
C30B29/12;C30B11/00;C30B11/02;G02B1/02 |
主分类号 |
C30B29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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