| 摘要 |
PURPOSE: An adsorption pad for a vacuum pump is provided to achieve improved adsorptive force for an object having a surface with a concave-convex or curvature. CONSTITUTION: An adsorption pad comprises a connection cover(10) having a connection hole(11) for connection with an air induction unit; an outer pad(20) mounted within the connection cover, and which forms the first vacuum formation unit(21); and an inner pad(30) coupled with the connected cover in the outer pad, and which forms the second vacuum formation unit(31) having a height lower than the height of the outer pad, and has a perforation hole(33) communicated to the connection hole. The inner pad is made of a material harder than the material of the outer pad.
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