| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the position controllability of a stage body by eliminating an effect of a reaction force brought by movement even when the stage body moves in a plurality of directions. SOLUTION: First and second stators are disposed such that the first stator is moved by a reaction force caused by movements of the stage bodies 14A and 14B in a first direction, and the first and second stators are moved by a reaction force caused by the movements of the stage bodies 14A and 14B in a second direction.</p> |
