PROJECTION TYPE X-RAY MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an X-ray microscope easily usable in a laboratory level and having a high resolution. SOLUTION: A projection type X-ray microscope generates X-ray by irradiating electron beam to an X-ray target, casts the generated X-ray on the specimen and photographs an X-ray transmission image of specimen. The X-ray target consists of a light element film and a metal piece fixed on the light element film. By irradiating electron beam on the metal piece constituting the X-ray target, an X-ray is generated from the region of diameter of tens nm below the metal piece.