| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an illumination apparatus for inspection capable of achieving compactness while maintaining advantage in terms of cost. SOLUTION: The illumination apparatus for inspection is provided with an illumination means 1 with a predetermined angle of illumination, a first lens 2 for condensing and converting light from the illumination means 1 into parallel light, and a second lens 5 for condensing light after the parallel light from the first lens 2 has passed through a through hole formed in an object to be inspected 3 and capturing the light in an image pickup means 4.</p> |
