发明名称 VIBRATION ISOLATION MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a vibration isolation mechanism the vibration-isolating performance of which is improved due to less friction resistance. SOLUTION: The mechanism has a coil spring 4, viscoelastic bodies 5A, 5B, and a guide 6 between a table 2 and a leg pedestal 3 which supports the table 2. The coil spring 4 isolates vibration in the vertical direction, acting on the table 2. The guide is a pendulum having a self-return function, both the ends are respectively supported by a point-contact with a spring presser and a bracket on the table side, the force in the direction to return to the current position is imparted, and the guide has the function of permiting relative displacement in the horizontal direction with respect to the table. Vibration isolation in the horizontal direction is executed mainly by the pendulum used for the guide 6. The friction resistance of the guide 6 is small because of point- contact. The viscoelastic bodies 5A, 5B dampen the vibration and the amplitude of the table 2.
申请公布号 JP2003130132(A) 申请公布日期 2003.05.08
申请号 JP20010323386 申请日期 2001.10.22
申请人 NEC AMENIPLANTEX LTD 发明人 WATAKARI SATOSHI
分类号 F16F15/02;G03F7/20;H01L21/027;(IPC1-7):F16F15/02 主分类号 F16F15/02
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