发明名称 |
APPARATUS FOR VACUUM DEPOSITION, SPECIFICALLY FOR METALLIZING PLASTIC FILM |
摘要 |
The apparatus comprise a vacuum chamber (3) inside which a feeding device of the substrate (F) and a bank (25) of vaporization sources are arranged. The substrate feeding device can be extracted from the vacuum chamber. Conversely, the vaporization source bank can be raised from a lower vaporization position to a higher maintenance position without needing to be extracted from said vacuum chamber. |
申请公布号 |
WO03038142(A1) |
申请公布日期 |
2003.05.08 |
申请号 |
WO2002IT00687 |
申请日期 |
2002.10.29 |
申请人 |
GALILEO VACCUM SYSTEM S.R.L.;FUSI, ANDREA;CENI, MARIO |
发明人 |
FUSI, ANDREA;CENI, MARIO |
分类号 |
C23C14/24;C23C14/56 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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