发明名称 APPARATUS FOR VACUUM DEPOSITION, SPECIFICALLY FOR METALLIZING PLASTIC FILM
摘要 The apparatus comprise a vacuum chamber (3) inside which a feeding device of the substrate (F) and a bank (25) of vaporization sources are arranged. The substrate feeding device can be extracted from the vacuum chamber. Conversely, the vaporization source bank can be raised from a lower vaporization position to a higher maintenance position without needing to be extracted from said vacuum chamber.
申请公布号 WO03038142(A1) 申请公布日期 2003.05.08
申请号 WO2002IT00687 申请日期 2002.10.29
申请人 GALILEO VACCUM SYSTEM S.R.L.;FUSI, ANDREA;CENI, MARIO 发明人 FUSI, ANDREA;CENI, MARIO
分类号 C23C14/24;C23C14/56 主分类号 C23C14/24
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