发明名称 |
METHOD FOR FABRICATING MAGNETORESISTIVE THIN FILM OF MAGNETORESISTIVE SPIN VALVE BY USING DIFFERENCE OF COERCIVE FORCE |
摘要 |
PURPOSE: A method for fabricating a magnetoresistive thin film of a magnetoresistive spin valve by using a difference of coercive force is provided to form a spin valve structure that expresses high magnetoresistivity and high magnetic sensitivity in a low magnetic field, by controlling the spin of a CoFe layer and a NiFe layer while using a coercive force. CONSTITUTION: The CoFe layer is formed as the first ferromagnetic layer by a thickness of 20-100 angstrom in a condition that sputtering power is 20-100 watt and the partial pressure of Ar is 1-10 milliTorr so that the CoFe layer has high coercive force. The NiFe layer is formed as the second ferromagnetic layer by a thickness of 20-100 angstrom in a condition that sputtering power is 30-100 watt and the partial pressure of Ar is 1-15 milliTorr so that the NiFe layer has low coercive force.
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申请公布号 |
KR20030032533(A) |
申请公布日期 |
2003.04.26 |
申请号 |
KR20010064353 |
申请日期 |
2001.10.18 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
CHOI, WON JUN;KIM, EUN GYU;KIM, GWANG YUN |
分类号 |
H01L43/02;(IPC1-7):H01L43/02 |
主分类号 |
H01L43/02 |
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地址 |
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