发明名称 CRYSTALLIZATION APPARATUS FOR RECORDING FILM AND CRYSTALLIZATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for efficiently manufacturing high-quality recording media by shortening the time required for initialization of the recording media and a method for the same. SOLUTION: The crystallization apparatus for recording films having rapid heat annealing treatment equipments 10, UV photoirradiation apparatus 11 and heaters 9 for heating in deposition chambers 4 to 6 for the recording films used for the phase transition type optical recording media (phase transition type optical disks) is used and while the vacuum state in the deposition chambers in depositing the recording films is maintained, the recording films after or during the deposition are crystallized by the rapid heat annealing treatment equipments 10, the UV photoirradiation apparatus 11 and the heaters 9 for heating. The recording media having the recording films crystallized in the manner described above can be rapidly and efficiently initialized and further the recording films have the high quality; for example, the films have excellent jitter characteristics.
申请公布号 JP2003123326(A) 申请公布日期 2003.04.25
申请号 JP20010319864 申请日期 2001.10.17
申请人 ULVAC JAPAN LTD 发明人 MORINAKA TAIZO;OTA ATSUSHI;TANI NORIAKI;KAWAMURA HIROAKI
分类号 B41M5/26;C23C14/58;G11B7/26 主分类号 B41M5/26
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