ELECTRIC CONNECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To operate a rubbing operation on the electrode of a semiconductor device. SOLUTION: An electric connection device includes a lattice-like frame having a plurality of openings in crossing first and second directions, a probe sheet which has a plurality of probe elements for respective openings and is arranged in one face of the frame so that the probe elements are positioned in parts corresponding to the openings and a sheetlike rubber material arranged in the openings. The probe sheet is disposed on the rubber material or the frame in a region except for the probe elements in such a way that the probe elements extend in a cantilever beam shape so that they can independently deform.