发明名称 SAMPLE INFORMATION-ACQUIRING METHOD AND TERAHERTZ LIGHT APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To reduce the trouble for measurement, simplify processing, and improve accuracy in the information of a sample that is obtained finally. SOLUTION: Terahertz light L4 that is generated from a terahertz light generator is guided to a specific region on the lower surface of a sample 100a, terahertz light L5 that is reflected by the specific region is detected by a terahertz light detector, and information on the sample 100a is acquired based on the detection result from the terahertz light detection section. The sample 100a is placed on a sample holder 40 where the upper surface is set to be a horizontal surface so that the lower surface of the sample 100a becomes a horizontal surface. The sample holder 40 has an opening for transmitting terahertz light L4 and L5. The terahertz light L5 that is generated from the terahertz light generator is allowed to enter the specific region on the lower surface of the sample 100a from the lower side, and the terahertz light L5 that is reflected from the specific region is guided to the terahertz light detector.</p>
申请公布号 JP2003121355(A) 申请公布日期 2003.04.23
申请号 JP20010312866 申请日期 2001.10.10
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 IWAMOTO TOSHIYUKI
分类号 G01N21/35;G01N21/01;G01N21/3563;G01N21/3586;G01N21/41;H01S3/00;(IPC1-7):G01N21/35 主分类号 G01N21/35
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