| 摘要 |
PROBLEM TO BE SOLVED: To make uniform the intensity distribution of an illumination device using light beams from a plurality of lasers. SOLUTION: The illumination device 15 concerned with a grating light valve 20 divides the light beams from the plurality of the lasers into a plurality of beams having equal intensity. The divided beams having the equal intensity are spatially shifted by using birefringence and beams having no coherence are put one over another to obtain illumination light having a uniform intensity distribution. As a means for intensity division, a style using multiple reflection and a style using polarization are available, but the former style can increase the number of beam divisions and is advantageous in cost.
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