| 摘要 |
<p>Micro-valves (7) that include a diaphragm (10) capable of being positioned on a valve seat (20) or removed from the valve seat (20). The micro-valves (7) also include supports (100, 120, 200) and a cover (90) that restrict the motion of the diaphragm (10), thereby reducing the possibility of cracking. Micro-valves (7) made by anodically bonding the diaphragm (10) to a seat substrate (20) and anodically bonding the cover (90) to the diaphragm (10). Micro-injectors (400) that include micro-valves (7). Also, methods of making the micro-valves (7) and micro-injectors (400). The diaphragm may comprise a different material, eg. silicon, than the seat substrate, eg. a glass.</p> |
