发明名称 |
Detection of film thickness through induced acoustic pulse-echos |
摘要 |
Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Heterodyne interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.
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申请公布号 |
US6552803(B1) |
申请公布日期 |
2003.04.22 |
申请号 |
US19990375664 |
申请日期 |
1999.08.17 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
WANG HAIMING;LEE SHING;NIKOONAHAD MEHRDAD |
分类号 |
G01B21/08;G01B9/02;G01B11/06;G01B17/02;G01N29/00;G01N29/24;G01N29/34;(IPC1-7):G01B9/02 |
主分类号 |
G01B21/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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