| 发明名称 |
Segmenting of processing system into wet and dry areas |
| 摘要 |
A method and apparatus for processing a substrate is described. In one aspect, a processing system is provided which includes a wet area and a dry area. In another aspect, a method comprises processing the substrate in the process cell. The substrate is transferred from the process cell to a dry module and then transferring the substrate to a drying area.
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| 申请公布号 |
US6551488(B1) |
申请公布日期 |
2003.04.22 |
| 申请号 |
US20000658336 |
申请日期 |
2000.09.08 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
HEY H. PETER W.;SUGARMAN MICHAEL N.;DENOME MARK |
| 分类号 |
C25D5/00;C25D7/12;H01L21/00;H01L21/288;H05K3/24;(IPC1-7):C25D7/12;C25D5/48;C25D17/00;C25F3/12 |
主分类号 |
C25D5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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