| 摘要 |
PROBLEM TO BE SOLVED: To extend the detection range of a strain sensor, and to make its detection precision higher by widening the range of strain in the elastic region of the metallic base material of the strain sensor, and reducing residual strain. SOLUTION: As a metallic base material 2 for the strain sensor 1, two-phase system stainless steel comprising Mo is used. When an insulating layer 3 and electrodes 4 and a resistor 5 are formed on the base material 2 by burning, the alpha phase of the stainless steel is transferred to the sigma phase by heat treatment of the burning, and strain applicable within the range of the elastic region spreads and residual strain decreases also. Consequently, a strain sensor having a wide detection range, and excellent in returnability to an origin, can be obtained.
|
