发明名称 Die bonder
摘要 A die bonder, to which semiconductor pellets 4 are supplied in an arranged state, comprises a substrate feeding mechanism for feeding a substrate 1 including a plurality of pellet islands to successively set the pellet island at a bonding position BP, a defective substrate detecting means 3 for detecting defective pellet island, and a pellet transfer mechanism. The pellet transfer mechanism successively picks up and carries a defective pellet to the bonding position BP for mounting when a pellet island of the substrate set at the bonding position is non-defective, and mounts a defective pellet 4a when a pellet island is defective. In this arrangement, when the defective substrate detecting means determines that a pellet island is defective, a defective pellet is mounted.
申请公布号 US6546985(B2) 申请公布日期 2003.04.15
申请号 US19990374847 申请日期 1999.08.16
申请人 NEC MACHINERY CORPORATION 发明人 AOKI TORU
分类号 H01L21/52;H01L21/00;(IPC1-7):H01L21/52;H01L21/66 主分类号 H01L21/52
代理机构 代理人
主权项
地址