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发明名称
摘要
申请公布号
JP3396482(B2)
申请公布日期
2003.04.14
申请号
JP19950508859
申请日期
1994.09.12
申请人
发明人
分类号
C23C22/00;C23C18/12;C23C22/56;C23C22/78;C23G1/12;C23G1/14;(IPC1-7):C23G1/14
主分类号
C23C22/00
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代理人
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