发明名称 LASER BEAM MACHINING SYSTEM AND LASER BEAM MACHINING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a laser beam machining system capable of suppressing dividing ratio accuracy low not depending on the reflection rate of a reflection plate, a transmission rate of a half mirror, a solid difference of the laser beam machining system, etc., despite the simple constitution, and obtaining stable dividing ratio accuracy in terms of an age-base, in the laser beam machining system provided with a multiple splitting optical path. SOLUTION: A laser beam machining system 100, wherein, in machining a predetermined work 5 by splitting a laser beam 2 oscillated from one laser oscillator 1 into a plurality of optical paths into 4-1, 4-2, 4-3 using a splitting means 3, a return polarization canceling means 8 canceling a return polarization of a laser return beam 7 is provided in a space optical path 6 formed between the laser oscillator 1 and the laser beam splitting means 3.</p>
申请公布号 JP2003103390(A) 申请公布日期 2003.04.08
申请号 JP20010294354 申请日期 2001.09.26
申请人 NEC CORP 发明人 MORITA HIROYUKI;NAKAJIMA TORU;ARIGA SATORU
分类号 G02B27/28;B23K26/00;B23K26/06;B23K26/067;B23K26/08;B23K26/20;H01S3/00;H01S3/13;(IPC1-7):B23K26/06 主分类号 G02B27/28
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