SEALING METHOD FOR SLIDABLY CONTACTING PART BETWEEN FIXED TANK AND TURNTABLE IN DRY FLUID BARREL POLISHING DEVICE AND DRY FLUID BARREL POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent biting of a thin workpiece to be polished with a thickness of <=1 mm or foreign matter such as small burrs peeled off a workpiece to be polished or fragments of abrasive occurring during a polishing process in a gap where a fixed tank and a turntable composing a polishing tank slidably contact in regard to a dry fluid barrel polishing device. SOLUTION: The gap 7 where the fixed tank 2 and the turntable 3 slidably contact during the polishing process is covered by a covering fluidized bed 16 formed by charging hard spherical particles 14, and a polishing fluidized bed 17 is formed by mixing the abrasive 13 and the workpiece 15 to be polished on a top face of the covering fluidized bed 16 to carry out the polishing process.