发明名称 METHOD OF MANUFACTURING PATTERN OF POWDER AGGREGATE
摘要 <p>PROBLEM TO BE SOLVED: To provide a technique for simply mass-producing fine patterns, etc., having fine layouts of bumps used for mounting semiconductor devices or made of a material hard to process such as titanium, etc. SOLUTION: The method of manufacturing a pattern of powder aggregate on a base comprises a step of preparing a model pattern 1, using a material for giving a distribution of magnetic field to outside, a step of providing the base 2 on the pattern 1, a step of contacting a powder 3 of a material having fixed magnetization to the base 2 in a magnetic field to form a pattern 4 of powder aggregate along the model pattern 1 on the base 2, and a step of depositing the pattern 4 of the powder aggregate to the base 2.</p>
申请公布号 JP2003100950(A) 申请公布日期 2003.04.04
申请号 JP20020200601 申请日期 2002.06.06
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 AOGAKI RYOICHI;OGATA MIKIO;ITO EIKO;SUGIYAMA ATSUSHI;SHINOHARA KENJI
分类号 H01L23/12;H01L21/60;(IPC1-7):H01L23/12 主分类号 H01L23/12
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