发明名称 Juxtaposed island manufacturing method by means of self-organised deposition on a substrate and structure obtained using said method
摘要 The invention relates to a structure composed of a substrate wherein a surface supports juxtaposed islands, characterized in that the islands rest on a periodic network of terraces composed of the intersection of two step networks, each terrace having a first dimension corresponding to the step width of one of the step networks and a second dimension corresponding to the step width of the other step network, each terrace supporting at least two islands formed of a different superimposition of monolayers wherein the composition is chosen between at least one first composition and one second composition.
申请公布号 US2003064570(A1) 申请公布日期 2003.04.03
申请号 US20020163035 申请日期 2002.06.04
申请人 MARTROU DAVID;MAGNEA NOEL 发明人 MARTROU DAVID;MAGNEA NOEL
分类号 H01L21/20;(IPC1-7):H01L21/20;H01L21/36 主分类号 H01L21/20
代理机构 代理人
主权项
地址