发明名称 |
Juxtaposed island manufacturing method by means of self-organised deposition on a substrate and structure obtained using said method |
摘要 |
The invention relates to a structure composed of a substrate wherein a surface supports juxtaposed islands, characterized in that the islands rest on a periodic network of terraces composed of the intersection of two step networks, each terrace having a first dimension corresponding to the step width of one of the step networks and a second dimension corresponding to the step width of the other step network, each terrace supporting at least two islands formed of a different superimposition of monolayers wherein the composition is chosen between at least one first composition and one second composition.
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申请公布号 |
US2003064570(A1) |
申请公布日期 |
2003.04.03 |
申请号 |
US20020163035 |
申请日期 |
2002.06.04 |
申请人 |
MARTROU DAVID;MAGNEA NOEL |
发明人 |
MARTROU DAVID;MAGNEA NOEL |
分类号 |
H01L21/20;(IPC1-7):H01L21/20;H01L21/36 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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