| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for correcting a dummy error of an imaged pictorial data generated due to an image blurring of an optical system or an imaging system. SOLUTION: The optical inspection method displays the imaged pictorial data obtained by imaging an object on a monitor to inspect the object. It detects the shift length between an image data containing a reference pattern composed of regularly configured patterns and the imaged pictorial data obtained by imaging the object containing the same reference pattern with the imaging optical system, stores an image blurring correction data to be approximated to the reference pattern based on this shift length, and then corrects the image blurring of the imaged pictorial data obtained by imaging the object, following the image blurring correction data.
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