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经营范围
发明名称
Formation of self-organized stacked islands for self-aligned contacts
摘要
申请公布号
AU2002335309(A1)
申请公布日期
2003.04.01
申请号
AU20020335309
申请日期
2002.09.05
申请人
PAUL SCHERRER INSTITUT
发明人
DETLEV GRUTZMACHER
分类号
H01L21/28;H01L21/336;H01L29/10;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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