Carrier identification system, carrier identification method and storage media

摘要

In a horizontal carriage type auto handler, it is possible to identify a carrier efficiently without stopping the carrier when reading the carrier identification information provided in the carrier for transferring a device and to reduce the number of sensors for reading identification information. A plurality of timing holes and data holes are provided in the carrier as identification information. The carrier is detected when a timing hole detection sensor and a data hole detection sensor detect the timing holes and the data holes.