发明名称 |
Optically aligning a loadport on a process machine by transmitting light through a system of apertures |
摘要 |
An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and an optical detector. The alignment block is provided with an aperture extending longitudinally through the block, or formed in a T-shape extending both longitudinally and transversely through the block. The light source may be suitably a laser emission source, or a laser source that operates in a pulse mode. The diameter of the aperture provided in the alignment block should be sufficiently small, i.e. smaller than 5 mm, and preferably smaller than 3 mm.
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申请公布号 |
US6541787(B2) |
申请公布日期 |
2003.04.01 |
申请号 |
US20010837814 |
申请日期 |
2001.04.18 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
LIN ANDREW;LIU YI-YU;CHENG TUNG-GAN;WU TUNG-LIANG;LIN HSUEH-CHENG;WU YAW-WEN;TSAI CHIA-FU |
分类号 |
H01L21/68;(IPC1-7):G01N21/86;G01V8/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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