| 摘要 |
PURPOSE: A structure of a vacuum chuck for absorbing a substrate is provided to reduce elements of failure in an LCD panel by improving a structure of a vacuum chuck. CONSTITUTION: An absorption plate(201) is used for absorbing a bottom face of a substrate. A plurality of concave grooves are formed along the first oblique line on an upper surface of the absorption plate(201). A plurality of vacuum lines(202) are formed by arraying the concave grooves according to a predetermined interval. A pipe is installed in the inside of the absorption plate(201) in order to absorb air from the plural vacuum lines(202) by using a vacuum generator. The substrate is formed with a glass substrate for forming an LCD panel. A plurality of vacuum lines can be formed along the second oblique line crossing the first oblique line.
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