| 发明名称 |
METHOD FOR SEPARATING TWO JOINED LAYERS OF MATERIAL |
| 摘要 |
The invention relates to a method for separating two joined layers of material along a boundary surface. The inventive method is characterized by producing, when the layers of material are joined, on the boundary surfaces thereof and/or close to the boundary surface, a plurality of cavities that form a perforated structure between the layers of material. |
| 申请公布号 |
WO03025978(A2) |
申请公布日期 |
2003.03.27 |
| 申请号 |
WO2002DE03453 |
申请日期 |
2002.09.16 |
| 申请人 |
OSRAM OPTO SEMICONDUCTORS GMBH;PLOESSL, ANDREAS |
发明人 |
PLOESSL, ANDREAS |
| 分类号 |
C23C16/30;H01L21/00;H01L21/18;H01L21/20;H01L21/205;H01L21/302;H01L21/762;H01L33/00 |
主分类号 |
C23C16/30 |
| 代理机构 |
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