| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam machining method by which an unnecessary cleavage is not caused on the surface of a work and the surface is not melted. SOLUTION: The laser beam machining method comprises a process for placing a work 1 on the placing table 107 of a laser beam machining apparatus 100, a process for forming an intended cutting part based on a reformed region in the inside of the work 1 along the intended cutting line 5 of the work 1 by heating the work 1 with a heating apparatus provided at the placing table 107, by adjusting the focus of a converging point P in the inside of the heated work 1 and by irradiating the work 1 with a laser beam L, and a process for cutting the work 1 by cooling the work 1 in which the intended cutting part based on the reformed region is formed and thereby causing stress by thermal stress.</p> |
