发明名称 Electric field assisted assembly process
摘要 This invention is directed toward a process of manufacturing, including a technique of assembling parts of an apparatus. The technique includes forming electrode structures on a substrate, suspending the apparatus part or parts in a dielectric medium between electrodes of the electrode structure, and using near-field (that is, short range) electric field forces to align the part or parts in pre-determined positions in accordance with the desired apparatus topography. The part or parts may include semiconductor die, nanometer wires for making connections to devices, or other components requiring precision alignment.
申请公布号 US6536106(B1) 申请公布日期 2003.03.25
申请号 US20000608796 申请日期 2000.06.30
申请人 THE PENN STATE RESEARCH FOUNDATION 发明人 JACKSON THOMAS N.;MAYER THERESA
分类号 H01L21/326;H01L21/768;(IPC1-7):H01R43/00 主分类号 H01L21/326
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