发明名称 |
METHOD FOR THE PRODUCTION OF A MEMBRANE |
摘要 |
The invention relates to a method for the production of a membrane, which only requires two lithographic steps. Said method has the advantage that membranes which are extensively compatible with existing CMOS, BiCMOS and bipolar processes can be produced. Furthermore membranes produced thus do not place increased requirements on the packages used, such that an economical production of the total system is guaranteed. |
申请公布号 |
WO03022732(A2) |
申请公布日期 |
2003.03.20 |
申请号 |
WO2002EP08553 |
申请日期 |
2002.07.31 |
申请人 |
INFINEON TECHNOLOGIES AG;AIGNER, ROBERT;PLOETZ, FLORIAN |
发明人 |
AIGNER, ROBERT;PLOETZ, FLORIAN |
分类号 |
B81B3/00;B81C1/00;H01L21/02;H01L21/764;H01L23/522;H01L27/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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