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发明名称
Veränderlicher Kondensator zur Bestimmung des Abstands zwischen einem Heizer und einem Verteilerkopf
摘要
申请公布号
DE10054146(C2)
申请公布日期
2003.03.20
申请号
DE20001054146
申请日期
2000.11.02
申请人
PROMOS TECHNOLOGIES, INC.
发明人
YU, HUNG-HSIU;WU, ALEX;SUNG, MING CHIH
分类号
C23C16/44;C23C16/52;G01B7/14;G01D5/241;(IPC1-7):G01B7/14;C23C16/01
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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