| 发明名称 |
MULTIPLE-NOZZLE THERMAL EVAPORATION SOURCE |
| 摘要 |
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may be coated with a thermally conductive material with a low emissivity material.
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| 申请公布号 |
US2003054100(A1) |
申请公布日期 |
2003.03.20 |
| 申请号 |
US20020234604 |
申请日期 |
2002.09.04 |
| 申请人 |
ESER ERTEN;HANKET GREGORY M. |
发明人 |
ESER ERTEN;HANKET GREGORY M. |
| 分类号 |
C23C14/24;(IPC1-7):C23C16/00 |
主分类号 |
C23C14/24 |
| 代理机构 |
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