发明名称 ELECTRODE FOR p-TYPE SiC
摘要 An electrode for p-type SiC which comprises a first electrode material comprising at least one selected from among nickel Ni, cobalt Co, palladium Pd and platinum Pt. The electrode for p-type SiC has good surface morphology and is reduced in the damage to a semiconductor crystal layer associated with the formation of the electrode.
申请公布号 WO03023837(A1) 申请公布日期 2003.03.20
申请号 WO2002JP08883 申请日期 2002.09.02
申请人 TOYODA GOSEI CO., LTD.;NAKATSUKA, OSAMU;KONISHI, RYOHEI;YASUKOCHI, RYUICHI;KOIDE, YASUO;MURAKAMI, MASANORI;SHIBATA, NAOKI 发明人 NAKATSUKA, OSAMU;KONISHI, RYOHEI;YASUKOCHI, RYUICHI;KOIDE, YASUO;MURAKAMI, MASANORI;SHIBATA, NAOKI
分类号 C23C14/14;H01L21/04;H01L21/28;H01L29/24;H01L29/45;H01L29/861;H01L29/868;(IPC1-7):H01L21/28;H01L29/80;H01L33/00 主分类号 C23C14/14
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