发明名称 |
System and method for estimating error in a manufacturing process |
摘要 |
A system and method for estimating errors within a semiconductor fabrication process. The system identifies an optimal number of error components based upon relevant context items. The system further estimates the error within the fabrication process and attributes portions of the error to each of the identified error components based upon feedback data received from the manufacturing process.
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申请公布号 |
US2003055524(A1) |
申请公布日期 |
2003.03.20 |
申请号 |
US20010956550 |
申请日期 |
2001.09.17 |
申请人 |
FIRTH STACY;CAMPBELL W. JARRETT |
发明人 |
FIRTH STACY;CAMPBELL W. JARRETT |
分类号 |
G05B19/418;H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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地址 |
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