SHAPE-CHANGEABLE MIRROR AND OPTICAL DISK INFORMATION INPUT/OUTPUT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a shape-changeable mirror which has a large quantity of change in the shape of a mirror surface and small strain of the mirror surface when the shape of the mirror surface is changed, a light information input/ output device equipped with an optical pickup device having the shape- changeable mirror, and a method for precisely manufacturing the shape- changeable mirror. SOLUTION: A mirror part of the shape-changeable mirror has a recessed part on the opposite side from the mirror surface. A mirror substrate of the mirror part is formed at the recessed part by anisotropically etching a silicon substrate.